Inpria, a spun-out from Oregon State University’s Department of Chemistry, is a pioneer in high-resolution metal oxide photoresists for extreme ultraviolet lithography (EUV).

Inpria is the world leader in metal oxide photoresist design, development and manufacturing.

Inpria was founded in 2007 and is headquartered in Corvallis, Oregon.


Inpria’s patented photo-condensed molecular oxides offer customers the unique ability to deposit – directly from solution – atomically smooth, intrinsically dense, and directly photopatternable metal oxide films, enabling advanced performance with simplified processing.


Inpria is backed by JSR Corporation, Air Liquide Venture Capital ALIAD, Applied Ventures, Intel Capital, Samsung Venture Investment Corporation, TSMC Partners and others. The company raised $31M in a Series C round on Feb 20, 2020. This brings Inpria's total funding to $67.8M to date.



  • Year founded: 2007
  • Funding Info: $67.8M over 5 Rounds (Latest Funding Type: Series C)
  • Yearly Revenue: NA
  • Employee Size: 11-50
  • Business Valuation: NA
  • City/Town: Corvallis
  • State: Oregon
  • Country: United States
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